The ADC3683-SEP is fabricated in the TI CMOS
C021(C021, 65-nm process with a Back-End-Of-Line (BEOL) stack consisting of eight layers
of standard thickness aluminum metal. The total stack height from the surface of the
passivation to the silicon surface is 20.7μm based on nominal layer thickness.
Accounting for energy loss through the 1mil thick Aramica beam port window, the 40mm air
gap and the BEOL stack over the ADC3683-SEP, the effective LET (LET
EFF) at
the surface of the silicon substrate, the depth, and the ion range was determined with
the SEUSS 2020 Software [4] (provided by the Texas A&M Cyclotron Institute and based
on the latest SRIM-2013 models).
Table 4-1 lists the results.
Table 4-1 Ion LET EFF Depth and Range in Silicon
| Ion Type |
Angle of Incidence (°) |
RangeEFF in Silicon (µm) |
LETEFF (MeV × cm2/ mg) |
| 109Ag |
0 |
76.6 |
51.12 |