SLVK327 July 2026 TPS7H1301-SP
Figure 5-1 MSU Stack-up Calculator Used to Determine Key Ion ParametersThe TPS7H1301-SP is fabricated in the TI Linear BiCMOS 250-nm process with a back-end-of-line (BEOL) stack consisting of 4 levels of standard thickness aluminum. The total stack height from the surface of the passivation to the silicon surface is 10.885μm based on the nominal layer thickness.
Accounting for energy loss through the degrader, copper foil, beam port window, air gap, and the BEOL stack of the TPS7H1301-SP, the effective LET (LETEFF) at the surface of the silicon substrate and the range was determined with:
The results are shown in Table 5-1.
| Facility | Beam Energy (MeV/nucleon) | Ion Type | Degrader Steps (#) | Degrader Angle (°) | Copper Foil Width (μm) | Beam Port Window | Air Gap (mm) | Angle of Incidence | LETEFF (MeV·cm2/mg) | Range in Silicon (μm) |
|---|---|---|---|---|---|---|---|---|---|---|
| KSEE | 19.5 | 169Tm | - | - | 5 | 3-mil PEN | 60 | 0 | 74.97 | 90.4 |
| TAMU | 15 | 165Ho | 0 | 0 | - | 1-mil Aramica | 40 | 0 | 75 | 97.2 |