SLVK326 May 2026 ADS1278QML-SP
Accounting for energy loss through the degrader, copper foil, beam port window, air gap, and the BEOL stack of the ADS1278QML-SP, the effective LET (LETEFF) at the surface of the silicon substrate and the range was determined with SEUSS 2024 software (provided by TAMU and based on the latest SRIM-2013 [7] models)
The results are shown in Table 5-1.
| Facility |
Beam Energy (MeV/ nucleon) |
Ion Type |
Degrader Steps (#) |
Degrader Angle (°) |
Copper Foil Width (μm) |
Beam Port Window |
Air Gap (mm) |
Angle of Incidence (°) |
LETEFF (MeV·cm2/ mg) |
Range in Silicon (μm) |
|---|---|---|---|---|---|---|---|---|---|---|
| TAMU | 15 | 109Ag | 0 | 0 | - | 1-mil Aramica | 40 | 15 | 51 | 130 |