SPVA029 October 2025 TPS7H4011-SEP
The TPS7H4011-SEP is fabricated in the TI Linear BiCMOS 250-nm process with a back-end-of-line (BEOL) stack consisting of four levels of standard thickness aluminum and Damascene copper. The total stack height from the surface of the passivation to the silicon surface is 13.5 μm based on nominal layer thickness as shown in Figure 5-1. Accounting for energy loss through the degrader, copper foil, beam port window, air gap, and the BEOL stack of the TPS7H4011-SEP, the effective LET (LETEFF) at the surface of the silicon substrate and the depth was determined with:
SEUSS 2024 Software (provided by the Texas A&M Cyclotron Institute and based on the latest SRIM-2013 [7] models).
MSU Stack-Up Calculator (provided by MSU FRIB based on the latest SRIM-2013 [7] models).
The results are shown in Ion LETEFF and Range in Silicon.
Facility | Ion Type | Beam Energy (MeV/nucleon) | Degrader Steps (#) | Degrader Angle | Copper Foil Width (µm) | Beam Port Window | Air Gap (mm) | Angle of Incidence | LETEFF (MeV·cm2/ mg) | Range in Silicon (µm) |
|---|---|---|---|---|---|---|---|---|---|---|
TAMU | 109Ag | 15 | 0 | 0 | - | 1-mil Aramica | 40 | 0 | 48.2 | 91.6 |
KSEE | 109Ag | 19.5 | - | - | 5 | 3-mil PEN | 60 | 0 | 48 | 89.3 |